Polymethyl Methacrylate with a Molecular Weight of 107 g/mol for X-Ray Lithography

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The results of a study of syndiotactic polymethyl methacrylate with a molecular weight of 107 g/mol, synthesized via ionic polymerization with radiation initiation, are presented. Changes in the chemical structure of the polymer material have been analyzed by IR spectroscopy, differential thermal analysis, and gel permeation chromatography. During thermal decomposition of the initial polymer, the mass loss process can be divided into three stages: low-temperature, medium-temperature, and high-temperature. The pronounced thermal effect of polymer melting disappears even after exposure to minimal doses of ionizing radiation. A relatively rapid decrease in the molecular weight under the influence of X-ray radiation in the dose range up to 100 J/cm3 and a scatter in molecular sizes have been found. Polydispersity at low doses is approximately 3.5 times higher than that at doses of the order of 10 kJ/cm3. A latent image development rate of approximately five times higher than that of a polymer with a molecular weight of 106 g/mol under standard conditions was achieved. The contrast value was 3.4. Using X-ray synchrotron radiation at the VEPP-3 source, microstructuring was carried out by X-ray lithography. Microstructures up to 5 µm high and about 2 µm in diameter were obtained.

作者简介

V. Nazmov

Budker Institute of Nuclear Physics of SB RAS; Institute of Solid State Chemistry and Mechanochemistry of SB RAS

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Email: V.P.Nazmov@inp.nsk.su
Russia, 630090, Novosibirsk; Russia, 630090, Novosibirsk

A. Varand

Budker Institute of Nuclear Physics of SB RAS

Email: mikhailenkoma79@gmail.com
Russia, 630090, Novosibirsk

M. Mikhailenko

Institute of Solid State Chemistry and Mechanochemistry of SB RAS

编辑信件的主要联系方式.
Email: mikhailenkoma79@gmail.com
Russia, 630090, Novosibirsk

B. Goldenberg

Budker Institute of Nuclear Physics of SB RAS; Shared-Use Center “SKIF”, Boreskov Institute of Catalysis of SB RAS

Email: mikhailenkoma79@gmail.com
Russia, 630090, Novosibirsk; Russia, 630559, Novosibirsk

I. Prosanov

Institute of Solid State Chemistry and Mechanochemistry of SB RAS

Email: mikhailenkoma79@gmail.com
Russia, 630090, Novosibirsk

K. Gerasimov

Institute of Solid State Chemistry and Mechanochemistry of SB RAS

Email: mikhailenkoma79@gmail.com
Russia, 630090, Novosibirsk

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版权所有 © В.П. Назьмов, А.В. Варанд, М.А. Михайленко, Б.Г. Гольденберг, И.Ю. Просанов, К.Б. Герасимов, 2023