Wave-like periodic structures on the silicon surface initiated by irradiation with a focused gallium ion beam

Мұқаба

Дәйексөз келтіру

Толық мәтін

Ашық рұқсат Ашық рұқсат
Рұқсат жабық Рұқсат берілді
Рұқсат жабық Тек жазылушылар үшін

Аннотация

The processes of microrelief formation on the Si(100) surface under irradiation with a 30 keV Ga+ ion beam and a fluence of D = 1.25 × 1018–2 × 1019 cm–2 at incidence angles θ = 30°–85° was investigated. It was found that in the θ angular range 40°–70° faceted ripples were formed on the Si surface, and at θ = 30° sinusoidal ripples were formed. The experimental dependence of the wavelength of the periodic structure on the irradiation time λ(t) ~ tn, n = 0.33–0.35, was obtained. The average velocities of relief propagation and their direction relative to the direction of incident ions in the cases of θ = 30° and 40° were determined, which were –5.3 ± 0.6 and –6.3 ± 0.6 nm/s, respectively. The results obtained are discussed in detail within the framework of existing models of the formation of ripples on a surface under ion beam irradiation.

Негізгі сөздер

Авторлар туралы

V. Bachurin

Valiev Institute of Physics and Technology of the RAS

Email: vibachurin@mail.ru

 Yaroslavl Branch

Ресей, Yaroslavl

M. Smirnova

Valiev Institute of Physics and Technology of the RAS

Email: vibachurin@mail.ru

 Yaroslavl Branch

Ресей, Yaroslavl

K. Lobzov

Valiev Institute of Physics and Technology of the RAS

Email: vibachurin@mail.ru

Yaroslavl Branch

Ресей, Yaroslavl

M. Lebedev

Valiev Institute of Physics and Technology of the RAS

Email: vibachurin@mail.ru

Yaroslavl Branch

Ресей, Yaroslavl

L. Mazaletsky

Valiev Institute of Physics and Technology of the RAS

Email: vibachurin@mail.ru

 Yaroslavl Branch

Ресей, Yaroslavl

D. Pukhov

Valiev Institute of Physics and Technology of the RAS

Email: vibachurin@mail.ru

Yaroslavl Branch

Ресей, Yaroslavl

A. Churilov

Valiev Institute of Physics and Technology of the RAS

Хат алмасуға жауапты Автор.
Email: vibachurin@mail.ru

Yaroslavl Branch

Ресей, Yaroslavl

Әдебиет тізімі

  1. Navez M., Sella C., Chaperot D. // C. R. Acad. Sci. 1962. № 254. P. 240. https://gallica.bnf.fr/ark:/12148/bpt6k3206x/f248.item
  2. Bradley R.M., Harper M.E. // J. Vac. Sci. Technol. A. 1988. V. 6. P. 2390. https://doi.org/10.1116/1.575561
  3. Sigmund P. // J. Mater. Sci. 1973. V. 8. P. 1545. https://doi.org/10.1007/BF00754888
  4. Cuerno R., Kim J.-S. // J. Appl. Phys. 2020. V. 128. P. 180902. https://doi.org/10.1063/5.0021308
  5. Makeev M.A., Cuerno R., Barbasi A. // Nucl. Instrum. Methods Phys. Res. B. 2002. V. 197. P. 185. https://doi.org/10.1016/S0168-583X(02)01436-2
  6. Valbusa U., Borgano C., Mongeot F. // J. Phys.: Condens. Matter. 2002. V. 14. P. 8153. https://doi.org/10.1088/0953-8984/14/35/301
  7. Muñoz-García J., Vázquez L., Castro M., Cago R., Redondo-Cubero A., Moreno-Barrado A., Cuerno R. // Mater. Sci. Eng. R. 2014. V. 86. P. 1. https://doi.org/10.1016/j.mser.2014.09.00
  8. Vázquez L., Redondo-Cubero A., Lorenz K., Palomares F. J., Cuerno R. // J. Phys.: Condens. Matter. 2022. V. 34. P. 333002. https://doi.org/10.1088/1361-648X/ac75a1
  9. Carter G., Vishnyakov V. // Surf. Interface Anal. 1995. V. 23. P. 514. https://doi.org/10.1002/sia.740230711
  10. Elst K., Vandervorst W. // J. Vac. Sci. Technol. A. 1994. V. 12. P. 3205. https://doi.org/10.1116/1.579239
  11. Smirnov V.K., Kibalov D.S., Krivelevich S.A., Lepshin P.A., Potapov E.V., Yankov R.A., Skorupa W., Makarov V.V., Danilin A.B. // Nucl. Instrum. Methods Phys. Res. B. 1999. V. 147. P. 310. https://doi.org/10.1016/S0168-583X(98)00610-7
  12. Hofsäss H. // Appl. Phys. A. 2014. V. 114. P. 401. https://doi.org/10.1007/s00339-013-8170-9
  13. Bobes O., Zhang K., Hofsäss H. // Phys. Rev. B. 2012. V. 86. P. 235414. https://doi.org/10.1103/PhysRevB.86.235414
  14. Carter G., Vishnyakov V. // Phys. Rev. B. 1996. V. 54. P. 17647. https://doi.org/10.1103/PhysRevB.54.17647
  15. Norris S., Brenner M.P., Aziz M.J. // J. Phys.: Condens. Matter. 2009. V. 21. P. 224017. https://doi.org/10.1088/0953-8984/21/22/224017
  16. Norris S., Samela J., Bukonte L., Backman M., Diurabekova F., Nordlund K., Madi C.S., Brenner M.P., Aziz M.J. // Nat. Commun. 2011. V. 2. P. 276. https://doi.org/10.1038/ncomms1280
  17. Eckstein W. Computer Simulation of Ion-Solid Interaction. Berlin: Springer, 1991. 279 p. https://doi.org/10.1007/978-3-642-73513-4
  18. Habenicht S., Lieb K.P., Koch J. Wieck A.D. // Phys. Rev. B. 2002. V. 65. P. 115327. https://doi.org/10.1103/PhysRevB.65.11532
  19. Smirnova M.A., Ivanov A.S., Bachurin V.I., Churilov A.B. // J. Phys.: Conf. Ser. 2021. V. 2086. P. 012210. https://doi.org/10.1088/1742-6596/2086/1/012210
  20. Smirnova M.A., Bachurin V.I., Mazaletsky L.A., Pukhov D.E., Churilov A.B., Rudy A.S. // J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 2021. V. 15. P. 150. https://doi.org/10.1134/S1027451022020380
  21. Smirnova M.A., Bachurin V.I., Lebedev M.E., Mazaletsky L.A., Pukhov D.E., Churilov A.B., Rudy A.S. // Vacuum. 2022. V. 203. P. 111283. https://doi.org/10.1016/j.vacuum.2022.111238
  22. Frey L., Lehrer C., Ryssel H. // Appl. Phys. A. 2003. V. 76. P. 1017. https://doi.org/10.1007/s00339-002-1943-1
  23. Kramczynski D., Reuscher B., Gnaser H. // Phys. Rev. B. 2014. V. 89. P. 205422. https://doi.org/10.1103/PhysRevB.89.205422
  24. Cuerno R., Barabasi A.L. // Phys. Rev. Lett. 1995. V. 74. P. 4746. https://doi.org/10.1103/PhysRevLett.74.4746
  25. Kahng B., Jeong H., Barbasi A.I. // Appl. Phys. Lett. 2001. V. 78. P. 805. https://doi.org/10.1063/1.1343468
  26. Carter G., Nobes M. J., Paton F., Williams J.S., Whitton J.L. // Radiat. Eff. 1977. V. 33. P. 65. https://doi.org/10.1080/00337577708237469
  27. Vishnyakov V., Carter G., Goddard D.T., Nobes M. J. // Vacuum. 1995. V. 46. P. 637. https://doi.org/10.1016/0042-207X(95)00003-8
  28. Carter G., Vishnyakov V., Martynenko Yu.V., Nobes M.J. // J. Appl. Phys. 1995. V. 78. P. 3559. https://doi.org/10.1063/1.359931
  29. Alkemade P.F.A. // Phys. Rev. Lett. 2006. V. 96. P. 107602. https://doi.org/10.1103/PhysRevLett.96.107602
  30. Smirnov V.K., Kibalov D.S., Lepshin P.A., Bachurin V.I. // IzV. Akad. Nauk. Ser. Fiz. 2000. V. 64. P. 626.
  31. Karmakar P., Mollick S.A., Ghose D., Chakrabarti A. // Appl. Phys. Lett. 2008. V. 93. P. 103102. https://doi.org/10.1063/1.2974086
  32. Wittmaack K. // Surf. Interface Anal. 2000. V. 29. P. 721. https://doi.org/10.1002/1096-9918(200010)29: 10<721:: AID-SIA916>3.0.CO;2-Q
  33. Bachurin V.I., Lepshin P.A., Smirnov V.K. // Vacuum. 2000. V. 56. P. 241. https://doi.org/10.1016/S0042-207X(99)00194-3
  34. Bhowmik D., Mukherjee M., Karmakar P. // Nucl. Instrum. Methods B. 2019. V. 444. P. 54. https://doi.org/10.1016/j.nimb.2019.02.010
  35. Bachurin V.I., Zhuravlev I.V., Pukhov D.E., Rudy A.S., Simakin S.G., Smirnova M.A., Churilov A.B. // J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 2020. V. 14. P. 784. https://doi.org/10.1134/S1027451020040229
  36. Rudy A.S., Kulikov A.N., Metlitskaya A.V. // Russ. Microelectron. 2011. V. 40. P. 109. https://doi.org/10.1134/S1063739711020089
  37. Rumyantsev A.V., Borgardt N.I., Volkov R.L. // J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 2018. V. 12. P. 607. https://doi.org/10.1134/S1027451018030345
  38. Erlebacher J., Aziz M.J. // Phys. Rev. Lett. 1999. V. 82. P. 2330. https://doi.org/10.1103/PhysRevLett.82.2330
  39. Yewande E.O., Hartmann A.K., Kree R. // Phys. Rev. B. 2005. V. 71. P. 195405. https://doi.org/10.1103/PhysRevB.71.195405
  40. Aste T., Valbusa U. // New J. Phys. 2005. V. 7. P. 122. https://doi.org/10.1088/1367-2630/7/1/122
  41. Munoz-Garcia J., Castro M., Cuerno R. // Phys. Rev. Lett. 2006. V. 96. P. 086101. https://doi.org/10.1103/PhysRevLett.96.086101
  42. Munoz-Garcia J., Castro M., Cuerno R. // Phys. Rev. B. 2008. V. 78. P. 205408. https://doi.org/10.1103/PhysRevB.78.205408

Қосымша файлдар

Қосымша файлдар
Әрекет
1. JATS XML

© Russian Academy of Sciences, 2024