Wave-like periodic structures on the silicon surface initiated by irradiation with a focused gallium ion beam
- Авторлар: Bachurin V.I.1, Smirnova M.A.1, Lobzov K.N.1, Lebedev M.E.1, Mazaletsky L.A.1, Pukhov D.E.1, Churilov A.B.1
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Мекемелер:
- Valiev Institute of Physics and Technology of the RAS
- Шығарылым: № 7 (2024)
- Беттер: 69-82
- Бөлім: Articles
- URL: https://archivog.com/1028-0960/article/view/664796
- DOI: https://doi.org/10.31857/S1028096024070102
- EDN: https://elibrary.ru/EUVVTF
- ID: 664796
Дәйексөз келтіру
Аннотация
The processes of microrelief formation on the Si(100) surface under irradiation with a 30 keV Ga+ ion beam and a fluence of D = 1.25 × 1018–2 × 1019 cm–2 at incidence angles θ = 30°–85° was investigated. It was found that in the θ angular range 40°–70° faceted ripples were formed on the Si surface, and at θ = 30° sinusoidal ripples were formed. The experimental dependence of the wavelength of the periodic structure on the irradiation time λ(t) ~ tn, n = 0.33–0.35, was obtained. The average velocities of relief propagation and their direction relative to the direction of incident ions in the cases of θ = 30° and 40° were determined, which were –5.3 ± 0.6 and –6.3 ± 0.6 nm/s, respectively. The results obtained are discussed in detail within the framework of existing models of the formation of ripples on a surface under ion beam irradiation.
Негізгі сөздер
Авторлар туралы
V. Bachurin
Valiev Institute of Physics and Technology of the RAS
Email: vibachurin@mail.ru
Yaroslavl Branch
Ресей, YaroslavlM. Smirnova
Valiev Institute of Physics and Technology of the RAS
Email: vibachurin@mail.ru
Yaroslavl Branch
Ресей, YaroslavlK. Lobzov
Valiev Institute of Physics and Technology of the RAS
Email: vibachurin@mail.ru
Yaroslavl Branch
Ресей, YaroslavlM. Lebedev
Valiev Institute of Physics and Technology of the RAS
Email: vibachurin@mail.ru
Yaroslavl Branch
Ресей, YaroslavlL. Mazaletsky
Valiev Institute of Physics and Technology of the RAS
Email: vibachurin@mail.ru
Yaroslavl Branch
Ресей, YaroslavlD. Pukhov
Valiev Institute of Physics and Technology of the RAS
Email: vibachurin@mail.ru
Yaroslavl Branch
Ресей, YaroslavlA. Churilov
Valiev Institute of Physics and Technology of the RAS
Хат алмасуға жауапты Автор.
Email: vibachurin@mail.ru
Yaroslavl Branch
Ресей, YaroslavlӘдебиет тізімі
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