Plasma Distribution in a Column of a Low-Pressure Microwave Discharge Sustained by a Standing Surface Wave

Мұқаба

Дәйексөз келтіру

Толық мәтін

Аннотация

The structure of a low-pressure microwave discharge sustained by a standing surface electromagnetic wave (SEW) in a quartz tube filled with argon was studied. The standing wave was formed using a set of two flat metal mirrors, which formed an open SEW resonator. The plasma density profile and structure of the electromagnetic field of the SEW were studied in the pressure range from 0.25 to 10 Torr. The excitation of the standing wave allowed us to independently study the longitudinal Ez and transverse Er components of the SEW electric field vector. It was confirmed experimentally that the oscillation phases of the components of the SEW are shifted by π. The excitation of the standing wave in the plasma column leads to the formation of local minimums and maximums of plasma density, whose period equals half the wavelength of the surface wave. At the same time, the spatial period of density modulation is close to the distribution of the Ez component of the standing SEW. It was shown that the formation time of the modulated structure of plasma density is close to the characteristic time of diffusion, while the degree of modulation increases with increasing pressure. It was shown experimentally that it is possible to produce a plasma column with plasma density modulation nemax/nemin ≈ 5 and a length of about 10 wavelengths.

Авторлар туралы

V. Zhukov

Prokhorov General Physics Institute, Russian Academy of Sciences

Email: zhukov.vsevolod@physics.msu.ru
119991, Moscow, Russia

D. Karfidov

Prokhorov General Physics Institute, Russian Academy of Sciences

Хат алмасуға жауапты Автор.
Email: zhukov.vsevolod@physics.msu.ru
119991, Moscow, Russia

Әдебиет тізімі

  1. Schluter H., Shivarova A. // Physics Reports. 2007. V 443. № 4–6. P. 121–255. https://doi.org/10.1016/j.physrep.2006.12.006
  2. Sommerfeld A. // Ann. der Physik und Chem. 1899. Vol. 67. № 2. P. 233.
  3. Borges C.F.M., Airoldi V.T., Corat E.J., Moisan M., Schelz S., Guay D. // Journal of Applied Physics. 1996. V. 80. № 10. https://doi.org/10.1063/1.363600
  4. Moisan Michel, Karim Boudam, Denis Carignan, Danielle Kéroack, Pierre Levif, Jean Barbeau, Jacynthe Séguin, et al. // The European Physical Journal Applied Physics. 2013. V. 63. № 1. P. 10001. https://doi.org/10.1051/epjap/2013120510
  5. Istomin E.N., Karfidov D.M., Minaev I.M., Rukhad-ze A.A, Tarakanov V.P., Sergeichev K.F., Trefilov A.Yu. // Plasma Physics Reports. 2006. V. 32, № 5. P. 388–400. https://doi.org/10.1134/S1063780X06050047
  6. Zhao Jiansen, Zhen Sun, Yuxiang Ren, Lu Song, Shengzheng Wang, Wei Liu, Zhe Yu, and Yuhan Wei. // Journal of Physics D: Applied Physics. 2019. V. 52. № 29. https://doi.org/10.1088/1361-6463/ab1b0a
  7. Moisan M., Zakrzewski Z. // J. Phys. D: Appl. Phys. 1991. V. 24. P. 1025. https://doi.org/10.1088/0022-3727/24/7/001
  8. Moisan M., Shivarova A., Trivelpiece A.W. // Plasma Phys. 1982. V. 24. № 11. P. 1331. https://doi.org/10.1088/0032-1028/24/11/001
  9. Margot-Chaker J., Moisan M., Chaker M., Glaude V.M.M., Lauque P., Paraszczak J., Sauve G. // J. Appl. Phys. 1982. V. 66. № 9. P. 4134. https://doi.org/10.1063/1.343998
  10. Zhelyazkov I., Benova E., Atanassov V. // Journal of A-pplied Physics. 1986. V. 59. № 5. P. 1466–1472. https://doi.org/10.1063/1.336501
  11. Trivelpiece A.W. // The DP degree Thesis, California Institute of Technology, Pasadena, 1958.
  12. Rogers J., Asmussen J. // IEEE Trans. Plasma Sci. 1982. V. PS-10. № 1. P. 11. https://doi.org/0093-3813/82/0300-0011$00.75
  13. Wolinska-Szatkowska J. // J. Phys. D: Appl. Phys. 1988. V. 21. № 6. P. 937. https://doi.org/10.1088/0022-3727/21/6/012
  14. Rakem Z., Leprince P., Marec J. // Rev. Phys. Appl. (Paris). 1990. V. 25. № 1. P. 125. https://doi.org/10.1051/rphysap:01990002501012500
  15. Жуков В.И., Карфидов Д.М. // Физика плазмы. 2023. Т. 49. № 3. С. 260–269. https://doi.org/10.1134/S1063780X22601651
  16. Солнцев Г.С., Булкин П.С., Мокеев М.В., Цветко-ва Л.И. // Вестник Московского университета. 1997. Сер. 3. № 6. С. 36.
  17. Moisan M., Beaudry C., Leprince P. // Physics Letters A. 1974. V. 50. № 2. P. 125. https://doi.org/10.1016/0375-9601(74)90903-7
  18. Жуков В.И., Карфидов Д.М., Сергейчев К.Ф. // Физика плазмы. 2020. Т. 46. № 8. С. 1. https://doi.org/10.31857/S0367292120080120
  19. Moisan M., Levif P., Nowakowska H. // International Workshop “Microwave Discharges: Fundamentals and Applications” (MD): 3–7 September 2018, Zvenigorod, Russia: Proceedings. Moscow: Yanus-K, 2018.
  20. Cotrino J., Gamero A., Sola A., Saez M., Colomer V., Sanz-Medel A., Uria J.E. // Mikrochimica Acta. 1989. V. 99. № 3–6. P. 179. https://doi.org/10.1007/BF01244672
  21. Moisan M., Ferreira C.M., Hajlaoui Y., Henry D., Hubert J., Pantel R., Ricard A., Zakrzewski Z. // Revue de Physique Appliquée. 1982. V. 17. № 11. P. 707–27. https://doi.org/10.1051/rphysap:019820017011070700
  22. Cotrino J., Gamero A., Sola A., Colomer V. // Journal of Physics D: Applied Physics . 1988. V. 21. № 9. P. 1377–1383. https://doi.org/10.1088/0022-3727/21/9/010
  23. Кондратенко А.Н. // Поверхностные и объемные волны в ограниченной плазме. М.: Энергоатомиздат, 1985. С. 17.
  24. Nowakowska H., Lackowski M., Moisan M. // IEEE Trans. Plasma Sci. 2020. V. 48. № 6. P. 2106. https://doi.org/10.1109/TPS.2020.2995475
  25. Moisan M., Nowakowska H. // Plasma Sources Sci. Technol. 2018. V 27. № 7. 073001. https://doi.org/10.1088/1361-6595/aac528
  26. Moisan M., Ganachev I.P., Nowakowska H. // Physical Review E. 2022. V. 106. № 4. 045202. https://doi.org/10.1103/PhysRevE.106.045202
  27. Ferreira C.M., Moisan M. // Physica Scripta. 1988. V. 38. № 3. P. 382–399. https://doi.org/10.1088/0031-8949/38/3/008

© Russian Academy of Sciences, 2023